JPH0469458U - - Google Patents

Info

Publication number
JPH0469458U
JPH0469458U JP11382590U JP11382590U JPH0469458U JP H0469458 U JPH0469458 U JP H0469458U JP 11382590 U JP11382590 U JP 11382590U JP 11382590 U JP11382590 U JP 11382590U JP H0469458 U JPH0469458 U JP H0469458U
Authority
JP
Japan
Prior art keywords
processed
shielding plate
disposed
utility
support device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11382590U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11382590U priority Critical patent/JPH0469458U/ja
Publication of JPH0469458U publication Critical patent/JPH0469458U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP11382590U 1990-10-29 1990-10-29 Pending JPH0469458U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11382590U JPH0469458U (en]) 1990-10-29 1990-10-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11382590U JPH0469458U (en]) 1990-10-29 1990-10-29

Publications (1)

Publication Number Publication Date
JPH0469458U true JPH0469458U (en]) 1992-06-19

Family

ID=31861442

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11382590U Pending JPH0469458U (en]) 1990-10-29 1990-10-29

Country Status (1)

Country Link
JP (1) JPH0469458U (en])

Similar Documents

Publication Publication Date Title
JPH0469458U (en])
JPH0359365U (en])
JPH031962U (en])
JPS6169265U (en])
JPS5834955U (ja) 真空蒸着装置
JPH03105962U (en])
JPS61120760U (en])
JPH02102460U (en])
JPH01177000U (en])
JPH04652U (en])
JPH03100421U (en])
JPS62174718U (en])
JPS6283866U (en])
JPH0469490U (en])
JPS61113201U (en])
JPS61120759U (en])
JPH0177838U (en])
JPH01167036U (en])
JPS63174445U (en])
JPH0455139U (en])
JPH03123897U (en])
JPS6364767U (en])
JPS5983970U (ja) 真空蒸着装置における蒸着材料容器の引出し装置
JPH0399760U (en])
JPH0265341U (en])